A Study on Patterning Method of TiNi Shape Memory Thin Film

IEEJ Transactions on Sensors and Micromachines

Volumn 117, Issue 1, 1997, Pages 27-32

  Nakamura, Shigeo ^a   Nakanmra, Yousuke ^a   Ataka, Manabu ^a   Fujita, Hiroyuki ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343190909     PISSN: 13418939     EISSN: 13475525     Source Type: Journal    
DOI: 10.1541/ieejsmas.117.27     Document Type: Article

References (2)

1. A. D. Johnson and J. Shahoian: “RECENT PROGRESS IN THIN FILM SHAPE MEMORY MICROACTUATORS”, Proc. IEEE Micro Electro Mechanical Systems, Amsterdam, Netherland, 29 Jan. - 2 Feb., p 216 (1996,1)
2. R. H. Wolf and H. Heauer: “TiNi(Shape Memory) Films on Silicon for MEMS Applications”, Journal of Microelectromechanical Systems, 4-4, p 206 (1996,12)