Model of the cathode region and gas temperature of a dc glow discharge at high current density

Journal of Physics D: Applied Physics

Volumn 33, Issue 5, 2000, Pages 524-544

  Arslanbekov, Robert R ^a  

^a MONASH UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CURRENT DENSITY; EQUATIONS OF MOTION; HEAT TRANSFER; MATHEMATICAL MODELS; PLASMA APPLICATIONS; SENSITIVITY ANALYSIS; SPECTROSCOPIC ANALYSIS; THERMAL GRADIENTS;

HEAT TRANSFER EQUATION;

GLOW DISCHARGES;

EID: 0033903018     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/33/5/308     Document Type: Article

References (44)

1. Arslanbekov R R and Kudryavtsev A A 1998 Phys. Rev. E 58 6539
2. Arslanbekov R R and Kudryavtsev AA 1999 Phys. Plasmas 6 1003
3. Schoenbach K H, Chen H and Schaefer G 1990 J. Appl. Phys. 67 154
4. Serikov V V and Nanbu K 1997 J. Appl. Phys. 82 5948
5. Bogaerts A and Gijbels R 1995 J. Appl. Phys. 78 6427
6. Bogaerts A and Gijbels R 1996 J. Appl. Phys. 79 1279
7. Lawler J E 1985 Phys. Rev. A 32 2977
8. Arslanbekov R R and Kudryavtsev A A 1998 in Electron Kinetics and Applications of Glow Discharges (NATO ASI Series B 367) ed U Kortshagen and L D Tsendin, p 161
9. Arslanbekov R R, Tobin R C and Kudryavtsev A A 1997 J. Appl. Phys. 81 554
10. Kolobov V I and Tsendin L D 1992 Phys. Rev. A 46 7837
11. Gerstenberger D, Solanki R and Collins G J 1980 IEEE J. Quantum Electron. 16 820
12. Fetzer G J and Rocca J J 1992 IEEE J. Quantum Electron. 28 1941
13. Davis W D and Vanderslice T A 1963 Phys. Rev. 131 219
14. Abril I, Gras-Marti A and Vallés-Abarca J A 1983 Phys. Rev. A 28 3677
15. Kuchinskii V V, Sukhomlinov V S and Sheikin E G 1985 Sov. Phys. Tech. Phys. 30 38
16. Wroński Z, Sullivan J L and Saied S O 1992 J. Phys. D: Appl. Phys. 25 1607
17. Gras-Marti A, Vallés-Abarca J A and Bensaoula A 1987 J. Vac. Sci. Technol. A 5 2217
18. Mason R S and Allott R M 1994 J. Phys. D: Appl. Phys. 27 2372
19. Kuchinskii V V and Sheikin E G 1988 Sov. Phys. J. 30 697
20. Davison B 1958 Neutron Transport Theory (London: Oxford University Press)
21. Winterbon K B, Sigmund P and Sanders J B 1970 K. Dan. Vidensk. Selsk. Mat. Fys. Medd. 37 5
22. Luo Z 1985 Phys. Rev. B 32 812
23. Cuthbertson J W, Langer W D and Motley R W 1992 J. Nucl. Mater. 196-198 113
24. Bay H L, Winters H F, Coufal H J and Eckstein W 1992 Appl. Phys. A 55 274
25. Somekh R E 1984 J. Vac. Sci. Technol. A 2 1285
26. Oen O S and Robinson M T 1976 Nucl. Instrum. Methods 132 647
27. Gras-Marti A and Valles-Abarca J A 1983 J. Appl. Phys. 54 1071
28. Valles-Abarca J A and Gras-Marti A 1984 J. Appl. Phys. 55 1370
29. Abril I, Gras-Marti A and Valles-Abarca J A 1986 J. Vac. Sci. Technol. A 4 1773
30. Turner G M 1995 J. Vac. Sci. Technol. A 13 2161
31. Bogaerts A, van Straaten M and Gijbels R 1995 J. Appl. Phys. 77 1868
32. Robinson R S 1979 J. Vac. Sci. Technol. 16 185
33. Phelps A V et al 1998 Collisional Data Compilation ftp://jila.colorado.edu/collision_data
34. Bastien F, Hua W J, Goguillon P and Marode E 1990 J. Phys. D: Appl Phys. 23 813
35. Warner B E 1979 PhD Thesis University of Colorado
36. Cebeci T and Bradshaw P 1988 Physical and Computational Aspects of Convective Heat Transfer (New York: Springer)
37. Kennard E H 1938 Kinetic Theory of Gases (New York: McGraw-Hill)
38. Kaminsky M 1965 Atomic and Ionic Impact Phenomena on Metal Surfaces (New York: Academic)
39. Yamamura Y and Tawara H 1996 At. Data Nucl. Data Tables 62 149
40. Peard K A, Rózsa K and Tobin R C 1994 J. Phys. D: Appl. Phys. 27 219
41. Kushner M J 1981 IEEE J. Quantum Electron. 17 1555
42. Ainsworth M D and McIntosh A I 1988 J. Phys. D: Appl. Phys. 21 1295
43. Arslanbekov R R, Kudryavtsev A A and Tobin R C 1998 Plasma Sources Sci. Technol. 7 310
44. Warner B E, Persson K B and Collins G J 1979 J. Appl. Phys. 50 5694