Influence of ambient temperature on KrF laser ablation of polyimide in air

Applied Surface Science

Volumn 154, Issue , 2000, Pages 73-77

  Braun, A ^a   Zimmer, K ^a   Bigl, F ^a  

^a LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; AIR; EXCIMER LASERS; LASER ABLATION; MATHEMATICAL MODELS; SUBSTRATES; THERMAL EFFECTS;

BEER ABSORPTION LAW;

POLYIMIDES;

EID: 0033902281     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00396-7     Document Type: Article

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