Characterization of a geometrically desensitized interferometer for flatness testing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3520, Issue , 1998, Pages 284-292

  de Lega, Xavier Colonna ^a   Biegen, Jim ^a   Stephenson, Dave ^a   de Groot, Peter ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTION GRATINGS; INTERFEROMETRY; LIGHT TRANSMISSION; MATHEMATICAL MODELS; RAY TRACING;

FLATNESS TESTING; GEOMETRICALLY-DESENSITIZED INTERFEROMETERS (GDI);

INTERFEROMETERS;

EID: 0032256880     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

References (10)