Heavy-ion elastic-recoil detection analysis of doped-silica films for integrated photonics

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 624-628

  Weijers, T D M ^a   Gaff, K ^a   Timmers, H ^a   Ophel, T R ^a   Elliman, R G ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; COMPOSITION EFFECTS; GERMANIUM; HEAVY IONS; HYDROGEN; INTEGRATED OPTOELECTRONICS; ION BEAMS; OPTICAL FILMS; PHOTOSENSITIVITY; REFRACTIVE INDEX; THIN FILMS; TIN;

HEAVY ION ELASTIC RECOIL DETECTION ANALYSIS; ION BEAM ANALYSIS;

SILICA;

EID: 0033892617     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00850-2     Document Type: Article

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