Pure silicon plasma in a helicon plasma deposition system

Applied Physics Letters

Volumn 70, Issue 14, 1997, Pages 1814-1816

  Durandet, A ^a   Davis, C A ^a   Boswell, R W ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0343930755     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.118699     Document Type: Article

References (9)

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