New approach to laser direct writing active and passive mesoscopic circuit elements

Applied Surface Science

Volumn 154, Issue , 2000, Pages 593-600

  Chrisey, D B ^a   Pique, A ^a   Fitz Gerald, J ^a   Auyeung, R C Y ^a   McGill, R A ^a   Wu, H D ^a   Duignan, M ^b  

^a NAVAL RESEARCH LABORATORY   (United States)

^b Potomac Photonics Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM TITANATE; DEPOSITION; DIELECTRIC MATERIALS; ELECTRIC LINES; EVAPORATION; GOLD; METALLIC FILMS; MULTILAYERS; NICKEL ALLOYS; PULSED LASER APPLICATIONS; RESISTORS; THIN FILMS;

LASER-INDUCED FORWARD TRANSFER (LIFT); PULSED LASER DEPOSITION; PULSED LASER EVAPORATION;

CAPACITORS;

EID: 0033892566     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00465-1     Document Type: Article

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