Concept for zero-alignment micro optical systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3879, Issue , 1999, Pages 167-173

  Levy, Raviv ^a   Descour, Michael R ^a   Shul, Randy J ^a   Willison, Christi L ^a   Warren, Mial E ^a   Kololuoma, Terho ^a   Rantala, Juha T ^a  

^a UNIVERSITY OF ARIZONA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFRACTIVE OPTICS; ETCHING; MATHEMATICAL MODELS; MICROMACHINING; OPTICAL DEVICES; RAY TRACING; SILICON WAFERS; SOL-GELS; SUBSTRATES;

DIFFRACTIVE OPTICAL ELEMENTS; HYBRID SOL GEL MATERIAL; MICRO OPTICAL TABLE; ZERO ALIGNMENT MICRO OPTICAL SYSTEMS;

OPTICAL SYSTEMS;

EID: 0033348225     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)