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Volumn 359, Issue 1, 2000, Pages 68-76

Low temperature ZrB2 remote plasma enhanced chemical vapor deposition

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES; SYNTHESIS (CHEMICAL); THERMOANALYSIS; THIN FILMS; X RAY ANALYSIS; ZIRCONIA; ZIRCONIUM ALLOYS;

EID: 0033890283     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00721-X     Document Type: Article
Times cited : (18)

References (28)
  • 26
    • 85031589399 scopus 로고
    • Ph.D. Thesis, Institut National Polytechnique de Toulouse, France
    • A. Lebugle, Ph.D. Thesis, Institut National Polytechnique de Toulouse, France, 1975.
    • (1975)
    • Lebugle, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.