Diagnostic of Ar-BCl3 microwave discharges by optical emission spectroscopy

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 749-754

  Pierson, J F ^a   Czerwiec, T ^a   Belmonte, T ^a   Michel, H ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Etching; Microwave discharges; Optical emission spectroscopy

Indexed keywords

ARGON; BAND STRUCTURE; BORON COMPOUNDS; EMISSION SPECTROSCOPY; ENERGY TRANSFER; ETCHING; MICROWAVES; MOLECULAR STRUCTURE; REACTION KINETICS;

ELECTRON ATTACHMENT REACTIONS; MICROWAVE DISCHARGES; OPTICAL EMISSION SPECTROSCOPY (OES);

PLASMA DIAGNOSTICS;

EID: 0031342328     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00326-5     Document Type: Article

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