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Volumn 428, Issue , 1996, Pages 17-23
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Oxidation resistant dilute copper (boron) alloy films prepared by DC-magnetron cosputtering
a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ALLOYING;
ANNEALING;
COPPER ALLOYS;
ELECTRIC CONDUCTIVITY OF SOLIDS;
FILM PREPARATION;
MAGNETRON SPUTTERING;
METALLIZING;
OXIDATION RESISTANCE;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SEMICONDUCTING BORON;
THIN FILMS;
X RAY CRYSTALLOGRAPHY;
COPPER INTERCONNECTIONS;
SEMICONDUCTING FILMS;
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EID: 0030395805
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-428-17 Document Type: Conference Paper |
Times cited : (3)
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References (22)
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