Effects of low-thermal-budget treatments on the porous Si material properties

Journal of Porous Materials

Volumn 7, Issue 1, 2000, Pages 67-71

  Stalmans, L ^a   Poortmans, J ^a   Bender, H ^a   Jin, S ^a   Conard, T ^a   Nijs, J ^a,c   Debarge, L ^b   Slaoui, A ^b  

^a IMEC   (Belgium)

^b Faculté de Médecine   (France)

^c Department of Electrical Engineering

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL MODIFICATION; NITRIDING; NITROGEN; OXIDATION; PLASMA APPLICATIONS; POROSITY; SILICA;

PLASMA NITRIDATION; RAPID THERMAL OXIDATION (RTO);

POROUS SILICON;

EID: 0033881110     PISSN: 13802224     EISSN: None     Source Type: Journal    
DOI: 10.1023/a:1009607125037     Document Type: Article

References (6)

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