In situ X-ray multilayer reflectometry based on the energy dispersive method

Optics Communications

Volumn 173, Issue 1-6, 2000, Pages 255-263

  Malaurent, J C ^a   Duval, H ^a   Chauvineau, J P ^b   Hainaut, O ^b   Raynal, A ^b   Dhez, P ^c  

^a UNIVERSITÉ PARIS SUD   (France)

^b INSTITUT D'OPTIQUE GRADUATE SCHOOL   (France)

^c UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION; ELECTROMAGNETIC DISPERSION; LIGHT REFLECTION; MOLYBDENUM; PHOTODETECTORS; SILICON; X RAY TUBES; X RAYS;

ANGULAR DISPERSIVE METHOD; ENERGY DISPERSIVE METHOD; X RAY MULTILAYER REFLECTOMETRY;

OPTICAL MULTILAYERS;

EID: 0033874994     PISSN: 00304018     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0030-4018(99)00597-0     Document Type: Article

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