Three X-ray mask-making methods applied for LIGA process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3748, Issue , 1999, Pages 495-502

  Yang, Hsiharng ^a   Kang, Shung Wen ^a   Chou, Min Chieh ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROFORMING; MASKS; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE;

X RAY MASKS;

X RAY LITHOGRAPHY;

EID: 0032646818     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.360227     Document Type: Conference Paper

References (10)