In situ infrared observation of etching and oxidation processes on Si surfaces in NH4F solution

Journal of the Electrochemical Society

Volumn 147, Issue 4, 2000, Pages 1555-1559

  Niwano, Michio ^a   Kondo, Yusuke ^a   Kimura, Yasuo ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION SPECTROSCOPY; AMMONIUM COMPOUNDS; ETCHING; INFRARED SPECTROSCOPY; OXIDATION; PH EFFECTS; SURFACE CHEMISTRY;

AMMONIUM FLUORIDE; MULTIPLE INTERNAL REFLECTION GEOMETRY; OXIDE FORMATION; OXIDE REMOVAL;

SILICON WAFERS;

EID: 0033743479     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1393393     Document Type: Article

References (18)

1. Handbook of Semiconductor Wafer Cleaning Technology, W. Kern, Editor, Noyes Publications, Park Ridge, NJ (1993).
2. G. S. Higashi, Y. J. Chabal, G. W. Trucks, and K. Raghavachari, Appl. Phys. Lett., 56, 656 (1990).
3. S. Watanabe, N. Nakayama, and T. Ito, Appl. Phys. Lett., 59, 1458 (1991).
4. P. Jacob, Y. J. Chabal, K. Raghavachari, R. S. Becker, and A. J. Becker, Surf. Sci., 275, 407 (1992).
5. P. Allongue, V. Costa-Kieling, and H. Gerischer, J. Electrochem. Soc., 140, 1018 (1993).
6. S.-L. Yau, K. Kaji, and K. Itaya, Appl. Phys. Lett., 6 766 (1995).
7. Y.-C. Huang, J. Flidr, T. A. Newton, and M. A. Hines, Phys. Rev. Lett., 80, 4462 (1998).
8. T. A. Newton, J. A. Boiani, and M. A. Hines, Surf. Sci., 430, 67 (1998).
9. N. J. Harrick, Internal Reflection Spectroscopy. Wiley, New York (1967), second printing, Harrick, Ossining (1979).
10. Y. J. Chabal, Surf. Sci. Rep., 8, 211 (1988).
11. F. M. Mirabella, Jr. and N. J. Harrick, Internal Reflection Spectroscopy: Review and Supplement, Harrick, Ossining (1985).
12. M. Niwano, Y. Kimura, and N. Miyamoto, Appl. Phys. Lett., 65, 1692 (1994).
13. M. Niwano, T. Miura, Y. Kimura, R. Tajima, and N. Miyamoto, J. Appl. Phys., 79, 3708 (1996).
14. M. Niwano, T. Miura, and N. Miyamoto, J. Electrochem. Soc., 145, 659 (1998).
15. G. Lucovsky, Solid State Commun., 29, 571 (1979).
16. G. Lucovsky, J. Vac. Sci. Technol., 16, 1225 (1979).
17. J. A. Schaefer, D. Frankel, F. Stucki, W. Gopel, and G. J. Lapeyre, Surf. Sci. Lett., 139, L209 (1984).
18. P. Jacob, Y. J. Chabal, K. Kuhnke, and S. B. Christman, Surf. Sci., 302, 49 (1994).