Roughness in sputtered multilayers analyzed by transmission electron microscopy and X-ray diffuse scattering

Physica B: Condensed Matter

Volumn 283, Issue 1-3, 2000, Pages 157-161

  MacRander, A T ^a   Liu, C ^a   Csencsits, R ^b   Cook, R ^b   Kirk, M ^b   Headrick, R ^c  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; CORRELATION METHODS; SPUTTERING; SURFACE ROUGHNESS; SYNCHROTRON RADIATION; TRANSMISSION ELECTRON MICROSCOPY; X RAY ANALYSIS; X RAY SCATTERING;

BORN APPROXIMATION; X RAY DIFFUSE SCATTERING;

MULTILAYERS;

EID: 0033743459     PISSN: 09214526     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4526(99)01918-3     Document Type: Article

References (15)

1. Spiller E. Soft X-ray Optics. 1994;SPIE Engineering Press, Bellingham, WA.
2. C. Liu, J. Erdmann, A. Macrander, The APS Coating Facilities, SRI-CAT Newsletter, April 1997, Vol. 3, pp. 2-4, http://www.aps.anl.gov/sricat/news.html.
3. A.T. Macrander, L. Assoufid, C. Liu, C. Krasnicki, A. Khounsary, Optics fabrication and metrology group: status and capabilities, Advanced Photon Source CAT Communicator, Vol. 7, September 1997, pp. 11-15.
4. Macrander A.T., Headrick R.L., Liu C., Erdmann J., Khounsary A., Smolenski K., Krasnicki S., Maj J. SPIE Proc. 3448:1998;291.
5. M. Kirk, R. Csencsits, R. Cook, private communication.
6. Sinha S.K., Sirota E.B., Garoff S., Stanley H.B. Phys. Rev. B. 38:1988;2297.
7. Sinha S.K. J. Phys. (France) III. 4:1994;1543.
8. Savage D.E., Schimke N., Phang Y.-H., Lagally M.G. J. Appl. Phys. 71:1992;3283.
9. Savage D.E., Kleiner J., Schimke N., Phang Y.-H., Jankowski T., Jacobs J., Kariotis R., Lagally M.G. J. Appl. Phys. 69:1991;1412.
10. Salditt T., Metzger T.H., Brandt Ch., Klemradt U., Peisl J. Phys. Rev. B. 51:1995;5617.
11. Davis P.J., Rabinowitz P. Methods of Numerical Integration. 1984;230 Academic Press, New York.
12. Kaganer V.M., Stepanov S.A., Kohler R. Physica B. 221:1996;34.
13. Stearns D.G. J. Appl. Phys. 71:1992;4286.
14. Barabasi A.-L., Stanley H.E. Fractal Concepts in Surface Growth. 1995;Cambridge University Press, Cambridge. (Chapters 4 and 5).
15. Petford-Long A.K., Stearns MB., Chang C.-H., Nutt S.R., Stearns D.G., Ceglio N.M., Hawryluk A.M. J. Appl. Phys. 61:1987;1422.