Mechanical sensors based on laser-recrystallized SOI structures

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 400-404

  Druzhinin, A ^a   Lavitska, E ^a   Maryamova, I ^a   Voronin, V ^a  

^a LVIV POLYTECHNIC NATIONAL UNIVERSITY   (Ukraine)

Author keywords

Laser recrystallization; Mechanical sensors; Silicon on insulator structures

Indexed keywords

CRYSTAL IMPURITIES; LASER APPLICATIONS; MICROELECTROMECHANICAL DEVICES; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; SEMICONDUCTOR DOPING; SILICON ON INSULATOR TECHNOLOGY;

LASER RECRYSTALLIZATION; MICROELECTRONIC MECHANICAL SENSORS;

SENSORS;

EID: 0031167756     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80296-8     Document Type: Article

References (9)

1. A. Druzhinin et al., Physical model of SOI MOS-transistor for non-equilibrium state, Electronnaya Technika, ser. 3, Microelectronika, (5) (1990) 89-91.
2. A. Druzhinin et al., Photosensing structures on the basis of laser-recrystallized polysilicon layers, Fizicheskaya Electronica. Lvov, (40) (1990) 119-123.
3. V.A. Voronin et al., Laser-recrystallized polysilicon layers in sensors, Sensors and Actuators A, 30 (1992) 143-147.
4. J.M. Hode and J.P. Joly, Laser-solid interactions and transient thermal processing of materials, J. Phys. Colloq. C5, supp. 10, 44 (1983) C5-343-C5-350.
5. J.Y.W. Seto, The electrical properties of polycrystalline silicon films, J. Appl. Phys., 46 (1975) 5247-5254.
6. P.J. French and A.G.R. Evans, Piezoresistance in polysilicon and its application to strain gauges, Solid-State Electron., 32 (1989) 1-10.
7. V.A. Voronin, I.I. Maryamova, A.A. Druzhinin, E.N. Lavitska and Y.M. Pankov, SOI pressure sensors based on laser recrystallized polysilicon, in J.P. Collinge, V.S. Lynsenko and A.N. Nazarov (eds.), Physical and Technical Problems of SOI Structures and Devices, NATO ASI Series, 3. High Technology, Vol. 4, Kluwer, Dordrecht, 1995, pp. 281-286.
8. G.L. Bir and G.E. Pikus, Simmetria i Deformatsionniye Effecty v Poluprovodnikach, Nauka, Moscow, 1972.
9. J. Binder, W. Herring, E. Obermeier, H. Schaber and D. Gutter, Laser-recrystallized polysilicon resistors for sensing and integrated circuits application, Sensors and Actuators, 4 (1983) 525-536.