The microstructural dependence of the opto-electronic properties of nitrogenated hydrogenated amorphous carbon thin films

Thin Solid Films

Volumn 332, Issue 1-2, 1998, Pages 118-123

  Silva, S R P ^a   Khan, R U A ^a   Burden, A P ^a   Anguita, J V ^a   Shannon, J M ^a   Sealy, B J ^a   Papworth, A J ^b   Kiely, C J ^b   Amaratunga, G A J ^b  

^a UNIVERSITY OF SURREY   (United Kingdom)

^b UNIVERSITY OF LIVERPOOL   (United Kingdom)

Author keywords

Amorphous carbon; Electron energy loss spectra (EELS); Electronics; Joint density of states (JDOS); Microstructure

Indexed keywords

CARBON; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; DEFECTS; ELECTRIC CONDUCTIVITY OF SOLIDS; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRONIC DENSITY OF STATES; ELECTRONIC PROPERTIES; MOLECULAR STRUCTURE; OPTICAL PROPERTIES; SEMICONDUCTING FILMS; THIN FILMS;

AMORPHOUS CARBON FILMS; DIAMOND LIKE CARBON (DLC) FILMS;

AMORPHOUS FILMS;

EID: 0032476292     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)01070-0     Document Type: Article

References (16)

1. S.R.P. Silva, J. Robertson, G.A.J. Amaratunga, W.I. Milne (Eds.), Proc. of the Specialist Meeting on Amorphous Carbon (SMAC'97), World Scientific Press, Singapore, 1998.
2. S. Aisenberg, R. Chabot, J. Appl. Phys. 42 (1971) 2953.
3. H. Tsai, D.B. Bogy, J. Vac. Sci. Technol. A 5 (1987) 3287.
4. J.E. Jaskie, MRS Bull. 21 (1996) 59.
5. G.A.J. Amaratunga, S.R.P. Silva, Appl. Phys. Lett. 68 (1996) 2529.
6. S.R.P. Silva, G.A.J. Amaratunga, Thin Solid Films 253 (1994) 146.
7. P. Koidl, C. Wild, B. Dischler, J. Wagner, M. Ramsteiner, Mater. Sci. Forum 52/53 (1989) 41.
8. S.R.P. Silva, J. Robertson, G.A.J. Amaratunga, B. Rafferty, L.M. Brown, J. Schwan, D.F. Franceschini, G. Mariotto, J. Appl. Phys. 81 (1997) 2626.
9. G. Jungnickel, P.K. Sitch, Th. Frauenheim, B.R. Eggen, H.I. Heggie, C.D. Latham, C.S.G. Cousins, Phys. Rev. B 57 (1998) 1.
10. M.A. Tamor, W.C. Vassell, J. Appl. Phys. 76 (1994) 3832.
11. R.F. Eggerton, Electron Energy Loss Spectroscopy in the Electron Microscope, Plenum, New York, 1986.
12. S.R.P. Silva, G.A.J. Amaratunga, Rusli, S. Haq, E.K. Salje, Thin Solid Films 253 (1994) 20.
13. A.J. Papworth, S. Pringle, C.J. Kiely, G.A.J. Amaratunga, Ultramicroscopy (1998) submitted.
14. J. Frenkel, Phys. Rev. 54 (1938) 647.
15. S.M. Sze, Physics of Semiconductor Devices, Wiley, New York, 1981.
16. J.M. Shannon, S.C. Deane, B. McGarvey, J.N. Sandoe, Appl. Phys. Lett. 65 (1994) 2978.