Irradiation effects and thermal annealing behavior in H2+-implanted 6H-SiC

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 166, Issue , 2000, Pages 374-378

  Jiang, W ^a   Weber, W J ^a   Thevuthasan, S ^a   Grotzschel R ^b  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL LATTICES; HYDROGEN; ION IMPLANTATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SINGLE CRYSTALS;

BLISTERING; DAMAGE ACCUMULATION;

SILICON CARBIDE;

EID: 0033738182     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01050-2     Document Type: Article

References (15)

1. Wesch W. Nucl. Instr. and Meth. B. 116:1996;305.
2. Weber W.J., Wang L.M., Yu N. Nucl. Instr. and Meth. B. 116:1996;322.
3. Inui H., Mori H., Sakata T. Philos. Mag. B. 66:1992;737.
4. McHargue C.J., Williams J.M. Nucl. Instr. and Meth. B. 80/81:1993;889.
5. Grimaldi M.G., Calcagno L., Musumeci P., Frangis N., Van Landuyt J. J. Appl. Phys. 81:1997;7181.
6. Jiang W., Weber W.J., Thevuthasan S., McCready D.E. J. Nucl. Mater. 257:1998;295.
7. Jiang W., Weber W.J., Thevuthasan S., McCready D.E. Nucl. Instr. and Meth. B. 148:1999;562.
8. Jiang W., Weber W.J., Thevuthasan S., McCready D.E. Nucl. Instr. and Meth. B. 143:1998;333.
9. Weber W.J., Wang L.M., Yu N., Hess N.J. Mater. Sci. Eng. A. 253:1998;62.
10. Wendler E., Heft A., Wesch W. Nucl. Instr. and Meth. B. 141:1998;117.
11. Yamauchi S., Sagara A., Kamada K. Nucl. Eng. Design/Fusion. 4:1987;375.
12. Iwamoto N., Makino Y., Matsunami N. Nucl. Instr. and Meth. B. 32:1988;37.
13. Hojou K., Furuno S., Kushita K.N., Otsu H., Izui K. J. Nucl. Mater. 191-194:1992;583.
14. Sasaki T.A., Baba Y. J. Nucl. Mater. 138:1986;145.
15. Hojou K., Furuno S., Kushita K.N., Sasajima N., Izui K. Nucl. Instr. and Meth. B. 141:1998;148.