Evolution of thermoelastic strain and dislocation density during sublimation growth of silicon carbide

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 446-451

  Zhmakin, I A ^a   Kulik, A V ^a   Karpov, S Yu ^a   Demina, S E ^b   Ramm, M S ^b   Makarov, Yu N ^c  

^a SOFT IMPACT LTD   (Russian Federation)

^b IOFFE INSTITUTE   (Russian Federation)

^c UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL GROWTH; CRYSTALLIZATION; DISLOCATIONS (CRYSTALS); STRAIN; SUBLIMATION; THERMOELASTICITY; VAPOR DEPOSITION;

PHYSICAL VAPOR DEPOSITION (PVD); THERMOELASTIC STRAIN;

SILICON CARBIDE;

EID: 0033737358     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00307-6     Document Type: Article

References (8)

1. R.G. Verenchikova, E.E. Goncharov, G.A. Lomakina, E.N. Mokhov, M.G. Ramm, A.D. Roenkov, G.G. Ryabova, A.S. Tregubova, 6th conference on growth and synthesis of semiconductor crystals and films, in: Book of Abstracts, Novosibirsk Vol. 2 (1982) 158, in Russian.
2. A.S. Tregubova, E.N. Mokhov, A.D. Roenkov, I.L. Shulpina, A.V. Naumov, M.G. Ramm, 3rd workshop, physics and technology of wide band gap semiconductors, in: Book of Abstracts, Makhachkala (1986) 85, in Russian.
3. R.H. Ma, Q.-S. Chen, H. Zhang, V. Prasad, C.M. Balkas, N.K. Yushin, in: ACCGE-11, Abstracts (1999) 35.
4. M.S. Ramm, E.N. Mokhov, S.E. Demina, M.G. Ramm, A.D. Roenkov, Yu.A. Vodakov, A.S. Segal, A.N. Vorob'ev, S.Yu. Karpov, A.V. Kulik, Yu.N. Makarov, Mater. Sci. Eng. B 61-62 (1999) 107.
5. S.Yu. Karpov, A.V. Kulik, I.A. Zhmakin, Yu.N. Makarov, E.N. Mokhov, M.G. Ramm, M.S. Ramm, A.D. Roenkov, Yu.A. Vodakov, J. Cryst. Growth (2000) in press.
6. A.S. Jordan, R. Caruso, A.R. VonNeida, J.W. Nielsen, J. Appl. Phys. 52 (5) (1981) 3331.
7. Yu.N. Makarov, A.I. Zhmakin, J. Cryst. Growth 94 (1989) 537.
8. Yu.E. Egorov, A.O. Galyukov, S.G. Gurevich, Yu.N. Makarov, E.N. Mokhov, M.G. Ramm, M.S. Ramm, A.D. Roenkov, A.S. Segal, Yu.A. Vodakov, A.N. Vorob'ev, A.I. Zhmakin, Mater. Sci. Forum 264-268 (1998) 61.