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Volumn , Issue , 1998, Pages 132-133
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Source/drain extension scaling for 0.1 μm and below channel length MOSFETs
a a a a a a a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ELECTRIC CURRENTS;
ELECTRIC RESISTANCE;
GATES (TRANSISTOR);
SOURCE/DRAIN EXTENSION (SDE) SCALING;
MOSFET DEVICES;
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EID: 0031636458
PISSN: 07431562
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (90)
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References (4)
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