Depth of origin of atoms sputtered from WyC1-y compounds and the pure elements. A TRIM.SP and TRIDYN simulation study

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 164, Issue , 2000, Pages 748-754

  Eckstein, W ^a   Shulga, V I ^b  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

^b MOSCOW STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CARBON; COMPUTER SIMULATION; ION BOMBARDMENT; MONTE CARLO METHODS; TUNGSTEN; TUNGSTEN CARBIDE;

SOFTWARE PACKAGE TRIDYN; SOFTWARE PACKAGE TRIM.SP;

SPUTTERING;

EID: 0033733666     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)01033-2     Document Type: Article

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