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Volumn 39, Issue 5, 1999, Pages 823-837

High-stiffness precision actuator for small displacements

Author keywords

Accuracy; Actuator; Stiffness

Indexed keywords

DEFORMATION; ELASTICITY; HYDRAULIC DRIVES; PRECISION ENGINEERING; STIFFNESS;

EID: 0033132232     PISSN: 08906955     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0890-6955(98)00058-3     Document Type: Article
Times cited : (14)

References (13)
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    • (Jg. 39), Industrie Verlag AG, Zurich
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    • (1990) Technika , vol.14
    • Weck, M.1    Hartel, R.2    Bispink, T.3
  • 3
  • 4
    • 0342559718 scopus 로고
    • Examination of high precision slow-motion feed-drive systems for the sub-micrometer range, Progress in Precision Engineering
    • May Braunschweig
    • M. Weck, T. Bispink, Examination of high precision slow-motion feed-drive systems for the sub-micrometer range, Progress in Precision Engineering, Proceedings of the IPES 6 and UME 2, May 1991, Braunschweig, pp. 128-140.
    • (1991) Proceedings of the IPES 6 and UME 2 , pp. 128-140
    • Weck, M.1    Bispink, T.2
  • 5
    • 0030712601 scopus 로고    scopus 로고
    • A linear piezomotor of high stiffness and nanometer resolution
    • Zhang B., Zhu Z., Zhang B., Fu W.-E., Wang J. A linear piezomotor of high stiffness and nanometer resolution. Annals of the CIRP. 46(1):1997;305-308.
    • (1997) Annals of the CIRP , vol.46 , Issue.1 , pp. 305-308
    • Zhang, B.1    Zhu, Z.2    Zhang, B.3    Fu, W.-E.4    Wang, J.5
  • 7
    • 0040740319 scopus 로고
    • Linear translation mechanisms for nanotechnological applications
    • Chetwynd D.G. Linear translation mechanisms for nanotechnological applications. Measurement and Control. 24:1991;37-46.
    • (1991) Measurement and Control , vol.24 , pp. 37-46
    • Chetwynd, D.G.1
  • 8
    • 0031256988 scopus 로고    scopus 로고
    • Mirror surface grinding of ceramics using a three-axes precision CNC grinding machine
    • Kim H.S., Lee D.G. Mirror surface grinding of ceramics using a three-axes precision CNC grinding machine. Machine Tools and Manufacture. 37(10):1997;1499-1510.
    • (1997) Machine Tools and Manufacture , vol.37 , Issue.10 , pp. 1499-1510
    • Kim, H.S.1    Lee, D.G.2
  • 11
    • 85033964642 scopus 로고
    • Microactuators for nanotechnological applications based on the phenomenon of contact deformations
    • in: M.H. Aliabadi, C. Alessandri (Eds.), Southampton-Boston
    • V.T. Portman, B.-Z. Sandler, Microactuators for nanotechnological applications based on the phenomenon of contact deformations, in: M.H. Aliabadi, C. Alessandri (Eds.), Contact Mechanics II: Computational Techniques, Computational Mechanics, Southampton-Boston, 1995, pp. 81-90.
    • (1995) Contact Mechanics II: Computational Techniques, Computational Mechanics , pp. 81-90
    • Portman, V.T.1    Sandler, B.-Z.2
  • 12
    • 0005117411 scopus 로고
    • Micro-positioning stage of 6 degrees-of-freedom with nanometer resolution
    • in: P. Seyfried, H. Kunzmann, P. McKeown, M. Weck (Eds.), Springer-Verlag, Berlin
    • S. Asano, T. Goto, Micro-positioning stage of 6 degrees-of-freedom with nanometer resolution, in: P. Seyfried, H. Kunzmann, P. McKeown, M. Weck (Eds.), Progress in Precision Engineering, Proceedings of the 6th International Precision Engineering Seminar, Springer-Verlag, Berlin, 1991, p. 362.
    • (1991) Progress in Precision Engineering, Proceedings of the 6th International Precision Engineering Seminar , pp. 362
    • Asano, S.1    Goto, T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.