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Volumn 370, Issue 1, 2000, Pages 78-84
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Dielectric properties of plasma-polymerized diphenyl thin films
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
ALUMINUM;
DIELECTRIC PROPERTIES OF SOLIDS;
DIELECTRIC RELAXATION;
ELECTRIC CONDUCTIVITY OF SOLIDS;
ELECTRON ENERGY LEVELS;
GLOW DISCHARGES;
PERMITTIVITY;
PLASMA POLYMERIZATION;
SEMICONDUCTING POLYMERS;
TEMPERATURE MEASUREMENT;
CAPACITIVELY COUPLED REACTOR;
PLASMA DEPOSITION;
PLASMA POLYMERIZED DIPHENYL THIN FILMS;
PLASMA PROCESSING;
THIN FILMS;
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EID: 0033723411
PISSN: 00406090
EISSN: None
Source Type: Journal
DOI: 10.1016/S0040-6090(00)00751-3 Document Type: Article |
Times cited : (29)
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References (32)
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