Ultra-low-energy ion-implant simulation using computational-efficient molecular dynamics schemes and the local damage accumulation model

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 458-461

  Kang, Jeong Won ^a   Kang, E S ^a   Son, M S ^a   Hwang, H J ^a  

^a Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; COMPUTER SIMULATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; PROBABILITY DENSITY FUNCTION;

LOCAL DAMAGE ACCUMULATION (LDA) MODEL;

ION IMPLANTATION;

EID: 0033712930     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591211     Document Type: Article

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