Nanopatterning of Au absorber films on Mo/Si EUV multilayer mirrors by STM lithography in self-assembled monolayers

Surface Science

Volumn 454, Issue 1, 2000, Pages 1104-1109

  Sundermann, M ^a   Hartwich, J ^a   Rott, K ^a   Meyners, D ^a   Majkova, E ^b   Kleineberg, U ^a   Grunze, M ^c   Heinzmann, U ^a  

^a BIELEFELD UNIVERSITY   (Germany)

^b INSTITUTE OF PHYSICS   (Slovakia)

^c UNIVERSITY OF HEIDELBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; GOLD; MOLYBDENUM; MORPHOLOGY; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SCANNING TUNNELING MICROSCOPY; SILICON; SURFACE ROUGHNESS;

NANOPATTERNING; SELF-ASSEMBLED MONOLAYERS;

MONOLAYERS;

EID: 0033703846     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(00)00208-9     Document Type: Article

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