Light bounces in two-beam scanning laser interferometers

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 39, Issue 5 A, 2000, Pages 2870-2875

  Fujimoto, Hiroyuki ^a   Mana, Giovanni ^b   Nakayama, Kan ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b Istituto di Metrologia Gustavo Colonnetti   (Italy)

Author keywords

Errors in laser interferometers; High resolution and accuracy; Laser interferometry; Metrology; Multiple reflections; X ray interferometry

Indexed keywords

COMPUTATIONAL METHODS; ERROR ANALYSIS; LASER APPLICATIONS; MEASUREMENT ERRORS; OPTICAL RESOLVING POWER; SCANNING; X RAY ANALYSIS;

LASER INTERFEROMETERS; X RAY INTERFEROMETERS;

INTERFEROMETERS;

EID: 0033690089     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.39.2870     Document Type: Article

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