The effect of RuO2Pt hybrid bottom electrode structure on the leakage and fatigue properties of chemical solution derived Pb(ZrxTi1-x)O3 thin films

Journal of Materials Research

Volumn 14, Issue 3, 1999, Pages 1018-1025

  Kim, Seung Hyun ^a   Hong, J G ^a   Streiffer, S K ^a   Kingon, Angus I ^a  

^a North Carolina State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COERCIVE FORCE; COMPOSITION EFFECTS; FATIGUE OF MATERIALS; FERROELECTRIC MATERIALS; LEAD COMPOUNDS; LEAKAGE CURRENTS; MAGNETIC HYSTERESIS; PLATINUM; POLARIZATION; REMANENCE; RUTHENIUM COMPOUNDS; THIN FILMS;

LEAD ZIRCONATE TITANATE; RUTHENIUM OXIDE;

DIELECTRIC FILMS;

EID: 0033100097     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0135     Document Type: Article

References (26)

1. H. Adachi, T. Mitsuyu. O. Yamajaki, and K. Wasa, J. Appl. Phys. 60, 736 (1986).
2. J.F. Scott and C.A. Araujo, Science 246, 1400 (1989).
3. J. Chen, K.R. Udayakumar, K.G. Brooks, and L.E. Cross, J. Appl. Phys. 71, 4465 (1992).
4. O. Auciello, K.D. Gifford, and A.I. Kingon, Appl. Phys. Lett. 64, 2873 (1994).
5. C.K. Kwok, D.P. Vijay, S.B. Desu, N.R. Parikh, and E.A. Hill, Proc. 4th Int. Symp. Integrated Ferroelectrics, edited by C.A. Paz de Araujo (University of Colorado Press, Colorado Springs, CO, 1992), p. 412.
6. R. Ramesh, H. Gilchrist, T. Sands, V.G. Keramidas, R. Haakenaasen, and D.K. Fork, Appl. Phys. Lett. 63, 3592 (1993).
7. R. Dat, D.J. Lichtenwalner, O. Auciello, and A.I. Kingon, Appl. Phys. Lett. 64, 2673 (1994).
8. A.I. Kingon et al., U.S. Patent No. 5,555,486 (4 September 1996).
9. Seung-Hyun Kim, Y.S. Choi, C.E. Kim, and Y.J. Oh, J. Mater. Res. 12, 1576 (1997).
10. I.S. Chung, J.K. Lee, W.I. Lee, C.W. Chung, and S.B. Desu, in Ferroelectric Thin Films, edited by B.A. Tuttle, S.B. Desu, R. Ramesh, and T. Shiosaki (Mater. Res. Soc. Symp. Proc. 361, Pittsburgh, PA, 1995), pp. 249-254.
11. H.N. Al-Shareef, O. Auciello, and A.I. Kingon, J. Appl. Phys. 77 (5), 2146 (1995).
12. Y. Takahashi and J. Yamaguchi, J. Mater. Sci. 25, 3950 (1990).
13. S-H. Kim, C.E. Kim, and Y.J. Oh, Thin Solid Films 305, 321 (1997).
14. G.J. Willems, D.J. Wouters, H.E. Maes, and R. Nouwen, Int. Ferroelectrics 15, 19 (1997).
15. C.J. Kim, D.S. Yoon, Z.T. Jiang, and K.S. No, J. Mater. Sci. 32, 1213 (1997).
16. S.Y. Chen and I.W. Chen, J. Am. Ceram. Soc. 81 (1), 97 (1998).
17. H.N. Al-Shareef, K.R. Bellur, O. Auciello, and A.I. Kingon, Ferroelectrics 152, 85 (1994).
18. C.K. Kwok and S.B. Desu, Ceram. Trans. 25, 82 (1992).
19. S.H. Kim, D.J. Kim, K.M. Lee, M. Park, A.I. Kingon, R.J. Nemanich, J. Im, and S.K. Streiffer, unpublished.
20. H.N. Al-Shareef, A.I. Kingon, X. Chen, K.R. Bellur, and O. Auciello, J. Mater. Res. 9, 2968 (1994).
21. H.N. Al-Shareef, K.R. Bellur, O. Auciello, and A.I. Kingon, Thin Solid Films 256, 73 (1995).
22. J.M. Longo, P.M. Raccah, and J.B. Goodenough, Mater. Res. Bull. 4, 191 (1969).
23. H.N. Al-Shareef, K.D. Gifford, M.S. Ameen, S.H. Rou, P.D. Hren, O. Auciello, and A.I. Kingon, Ceram. Trans. 25, 97 (1992).
24. C.K. Kwok and S.B. Desu, J. Mater. Res. 8, 339 (1993).
25. E.L. Colla, A.K. Tagantsev, D.V. Taylor, and A.L. Kholkin, Int. Ferroelectrics 18, 19 (1997).
26. W.L. Warren, B.A. Tuttle, and D. Dimos, Appl. Phys. Lett. 67, 1426 (1995).