Grain morphology and cation composition heterogeneity of Pb(ZrxTi1-x)O3 thin films deposited by metal-organic chemical vapor deposition

Journal of Materials Research

Volumn 13, Issue 6, 1998, Pages 1614-1625

  Tsu, I Fei ^a,c   Bai, G R ^a   Foster, C M ^a   Merkle, K L ^a   Liu, K C ^b  

^a ARGONNE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF WISCONSIN MADISON   (United States)

^c SEAGATE TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL ORIENTATION; FILM GROWTH; GRAIN SIZE AND SHAPE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MORPHOLOGY; POLYCRYSTALLINE MATERIALS; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY SPECTROSCOPY;

CATION COMPOSITION HETEROGENEITY; GRAIN MORPHOLOGY; X RAY ENERGY DISPERSIVE SPECTROSCOPY (EDS);

LEAD COMPOUNDS;

EID: 0032094744     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1998.0222     Document Type: Article

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