Ion beam assisted deposition of Al2O3 optical waveguides on silicon

Surface and Coatings Technology

Volumn 128-129, Issue 1, 2000, Pages 121-125

  Zhang, Q Y ^a   Wang, P S ^a   Zhao, W J ^a   Wang, L ^b  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b Dalian Marine University   (China)

Author keywords

Al2O3 film; Ion beam assisted deposition; Optical waveguide

Indexed keywords

ALUMINA; DOPING (ADDITIVES); ERBIUM; ION BOMBARDMENT; REFRACTIVE INDEX; SILICON; SYNTHESIS (CHEMICAL); THERMODYNAMIC STABILITY; TRANSPARENCY;

ION BEAM ASSISTED DEPOSITION (IBAD);

OPTICAL WAVEGUIDES;

EID: 0033688602     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(00)00589-2     Document Type: Article

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