Orientation control in PZT/Pt/TiN multilayers with various Si and SiO2 underlayers for high performance ferroelectric memories

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 1, 2000, Pages 231-236

  Kushida Abdelghafar, Keiko ^a   Torii, Kazuyoshi ^a   Mine, Toshiyuki ^a   Kachi, Tsuyoshi ^a   Fujisaki, Yoshihisa ^a  

^a HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DIELECTRIC FILMS; FERROELECTRIC MATERIALS; FILM GROWTH; LEAD COMPOUNDS; MULTILAYERS; PLATINUM; SILICA; SILICON; SUBSTRATES; SURFACE ROUGHNESS; TITANIUM NITRIDE;

LEAD ZIRCONATE TITANATE;

CAPACITORS;

EID: 0033683709     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591177     Document Type: Article

References (11)

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