RF-magnetron sputtered strontium titanate: structure, processing and property relationships

Materials Research Society Symposium - Proceedings

Volumn 603, Issue , 2000, Pages 57-62

  Gibbons, B J ^a   Fan, Y ^a   Findikoglu, A T ^a   Reagor, D W ^a   Jia, Q X ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COMPOSITION EFFECTS; DEPOSITION; DIELECTRIC PROPERTIES; ELECTRIC VARIABLES MEASUREMENT; MAGNETRON SPUTTERING; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRUCTURE (COMPOSITION); THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EFFECTIVE LOSS TANGENT; OZONE TREATMENT; TUNABILITY;

STRONTIUM COMPOUNDS;

EID: 0033678062     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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