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Volumn 594, Issue , 2000, Pages 87-92
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Plasticity in copper thin films
a
IFW DRESDEN
(Germany)
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Author keywords
[No Author keywords available]
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Indexed keywords
COPPER;
DISLOCATIONS (CRYSTALS);
INTERFACES (MATERIALS);
METALLIC FILMS;
METALLIZING;
PLASTIC DEFORMATION;
PLASTICITY;
STRAIN;
STRESS ANALYSIS;
THERMAL CYCLING;
FOUR-POINT BENDING;
WAFER CURVATURE TECHNIQUE;
THIN FILMS;
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EID: 0033652701
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Article |
Times cited : (5)
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References (12)
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