Monte Carlo simulation of electron beam plasma in a silane-argon mixture

Journal of Physics D: Applied Physics

Volumn 32, Issue 3, 1999, Pages 240-245

  Vasenkov, A V ^a  

^a NOVOSIBIRSK STATE UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; CALCULATIONS; COMPUTER SIMULATION; ELECTRON TRANSPORT PROPERTIES; MOLECULES; MONTE CARLO METHODS; PLASMAS; ELECTRIC EXCITATION; ELECTRON BEAMS; SILANES;

ELECTRON BEAM PLASMA; SILANE ARGON MIXTURE;

ELECTRON BEAMS; PLASMAS;

EID: 0033531276     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/32/3/010     Document Type: Article

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