The surface chemistry of 1,1,1-trifluoro-2,4-pentanedione on clean and oxygen pre-covered Cu(210) a comparison with 1,1,1,5,5,5-hexafluoro-2,4-pentanedione and 2,4-pentanedione surface chemistry on the same surfaces

Surface Science

Volumn 419, Issue 2-3, 1999, Pages 97-103

  Nigg, H Lee ^a   Ford, Laura P ^a   Masel, R I ^a  

^a UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

Copper; Etching; Surface chemical reaction; Temperature programmed desorption

Indexed keywords

COPPER; ETCHING; FLUORINE COMPOUNDS; TEMPERATURE PROGRAMMED DESORPTION;

CARBON CARBON BOND SCISSION; OXYGEN PRE COVERED COPPER;

SURFACE CHEMISTRY;

EID: 0033521373     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(98)00745-6     Document Type: Article

References (18)

1. M.J. Hampden-Smith, T.T. Kodas, MRS Bull. June (1993) 39.
2. A. Tain, T.T. Kodas, M.J. Hampden-Smith, Thin Solid Films 269 (1995) 51.
3. M.A. George, D.W. Hess, S.E. Beck, J.C. Ivankovits, D.A. Bohling, A.P. Lane, J. Electrochem. Soc. 142 (1995) 961.
4. M.A. George, D.W. Hess, S.E. Beck, K. Young, D.A. Bohling, G. Voloshin, A.P. Lane, J. Electrochem. Soc. 143 (1996) 3257.
5. R.M. Steger, R.I. Masel, Thin Solid Films, in press.
6. R.M. Steger, L.A. Cadwell, R.I. Masel, in: Synthesis and Processing of Electronic Materials, AIChE, 1994, p. 142.
7. H.L. Nigg, R.I. Masel, Surf. Sci. 409 (1998) 428.
8. H.L. Nigg, L.P. Ford, R.I. Masel, J. Vac. Sci. Technol. A16 (1998) 3064.
9. H.L. Nigg, R.I. Masel, J. Vac. Sci. Technol., in press.
10. H.L. Nigg, R.I. Masel, J. Vac. Sci. Technol. 16 (1998) 2581.
11. H.L. Nigg, R.I. Masel, submitted to Surf. Sci.
12. A.K. Chen, R.I. Masel, Surf. Sci. 343 (1995) 17.
13. Y. Cong, V. Van Spaendonk, R.I. Masel, Surf. Sci. 385 (1997) 24.
14. Y. Cong, R.I. Masel, Surf. Sci. 396 (1998) 1.
15. H.L. Nigg, M.S. Thesis, Dept. of Chemical Engineering, University of Illinois at Urbana-Champaign, 1997.
16. L.P. Ford, M.S. Thesis, Dept. of Chemical Engineering, University of Illinois at Urbana-Champaign, 1997.
17. A.L. Andreassen, S.H. Bauer, J. Mol. Struct. 12 (1972) 381.
18. A.L. Andreassen, D. Zebelman, S.H. Bauer, J. Am. Chem. Soc. 93 (1971) 1148.