Reaction of 1,1,1,5,5,5-hexafluoro-2,4-pentanedione (H+hfac) with iron and iron oxide thin films

Journal of the Electrochemical Society

Volumn 143, Issue 10, 1996, Pages 3257-3266

  George, M A ^a   Hess, D W ^a   Beck, S E ^b   Young, K ^b   Bohling, D A ^b   Voloshin, G ^c   Lane, A P ^d  

^a Lehigh University   (United States)

^b AIR PRODUCTS AND CHEMICALS INC   (United States)

^c Schumacher   (United States)

^d TEXAS INSTRUMENTS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHELATION; CLEANING; ETCHING; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IRON; IRON OXIDES; KETONES; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

HEXAFLUOROPENTANDIONATES; TRIFLUOROACETATES; VAPOR PHASE CLEANING;

ELECTROCHEMISTRY;

EID: 0030263978     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1837194     Document Type: Article

References (37)

1. The National Technology Roadmap for Semiconductors, Semiconductor Industry Association (1994).
2. T. Ohmi, in Cleaning Technology in Semiconductor Device Manufacturing, J. Ruzyllo and R. E. Novak, Editors, PV 94-7, p. 3, The Electrochemical Society Proceedings Series, Pennington, NJ (1994).
3. J. C. Ivankovits, D. A. Bohling, A. Lane, and D. A. Roberts, ibid., p. 105.
4. R. E. Sievers and J. E. Sadlowski, Science, 201, 217 (1978).
5. T. P. Melia and R. Merrifield, J. Inorg. Nucl. Chem., 32, 2573 (1970).
6. F. A. Cotton and G. Wilkinson, Advanced Inorganic Chemistry, 5th ed., John Wiley & Sons, New York (1988).
7. M. Laing, Coordination Chemistry: A Century of Progress, G. B. Kaufman, Editor, p. 382, American Chemical Society, Washington, DC (1994).
8. F. Basolo and R. G. Pearson, Mechanisms of Inorganic Reactions: A Study of Metal Complexes in Solution, 2nd ed., John Wiley & Sons, New York (1967).
9. M. A. George, D. W. Hess, S. E. Beck, D. A. Bohling, B. S. Felker, and A. P. Lane, This Journal, 142, 961 (1995).
10. H. T. Ellingham, J. Soc. Chem. Ind., May, 125 (1944).
11. R. Gaskell, Introduction to Metallurgical Thermodynamics, Ch. 10, McGraw-Hill, New York (1973).
12. L. S. Darken and R. W. Gury, J. Am. Chem. Soc., 67, 1398 (1945).
13. D. G. Peters, J. M. Hayes, and G. M. Hieftje, A Brief Introduction to Modern Chemical Analysis, W. B. Saunders, Philadelphia, PA (1976).
14. L. S. Darken and R. W. Gurry, J. Am. Chem. Soc., 67, 1398 (1945).
15. Charles Evans and Associates, 301 Chesapeake Drive, Redwood City, CA, USA 94063
16. C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder, and G. E. Muilenberg, Handbook of Photoelectron Spectroscopy, Perkin-Elmer Corp., Eden Prarie, MN (1979).
17. D. A. Shirley, Phys. Rev., B5, 4709 (1972).
18. C. R. Brundle, T. J. Chuang, and K. Wandelt, Surf. Sci., 68, 459 (1977).
19. N. S. McIntyre and D. G. Zetaruk, Anal. Chem., 49, 1521 (1977).
20. E. D. Becken High Resolution NMR, 2nd ed., Academic Press, New York (1980).
21. B. L. Maxshoff and N. R. Armstrong, Langmuir, 7, 693 (1991).
22. F. Viani and F. Gesmundo, Corros. Sci., 20, 541 (1980)
23. J. B. Butt. Cotal. Lett., 7, 61 (1990).
24. V. M. Donnelly and M. E Gross, J. Vac. Sci. Technol. A, 11, 66 (1993).
25. J. A. Gardella, Jr., S. A. Ferguson, and R. L. Chin, Appl. Spectrosc., 40, 224 (1986).
26. M. P. Keane, S. Lunell, A. Naves De Brito, M. Carlsson-Gothe, S. Svensson, B. Wannberg, and L. Karlsson, J. Electron. Spectrosc. Rel. Mater., 56, 313 (1991) .
27. K. G. Standing, Proceedings of the Sixth International Conference on Secondary Ionization Mass Spectrometry (SIMS VI), A. Benninhoven, A. M. Huber, and H. W. Werner, Editors, p. 225, John Wiley & Sons, New York (1988).
28. R. W Mosher, L. Morris, and R. E. Sievers, Inorg. Chem., 2, 411 (1963).
29. R. D. Hancock and D. A. Thornton, J. Mol. Struct., 4, 377 (1969).
30. S. E. Beck, D. A. Bohling, B. S. Felker, M. A. George, A. G. Gilicinski, J. C. Ivankovits, J. G. Langan, S. W. Rynders, J. A. T. Norman, D. A. Roberts, G. Voloshin, D. W. Hess, and A. Lane, Cleaning Technology in Semiconductor Manufacturing, J. Ruzyllo and R. E. Novak, Editors, PV 94-7, p. 253, The Electrochemical Society Proceedings Series, Pennington, NJ (1994).
31. J. C. Ivankovits, D. A. Roberts, J. A. T. Norman, and D. A. Bohling, U.S. Pat. 5,028,724 (1992).
32. V. B. Lazarev, J. H. Greenberg, Z. P. Ozerova, and G. A. Sharpataya, J. Therm. Anal., 33, 797 (1988).
33. E. A. Mazurenko, A. I. Gerasimchuk, and Zh. N. Bublik, Ukr. Khem. Zh., 57, 1011 (1991).
34. H. G. M. Edwards and I. R. Lewis, J. Mol. Struct., 296, 15 (1993).
35. M. J. Baillie, D. H. Brown, K. C. Moss, and D. W. A. Sharp, J. Chem. Soc. (A), 3110 (1968).
36. C. S. Kuivila, P. C. Stair, and J. B. Butt, J. Catal., 118, 299 (1989).
37. S. E. Beck, M. A. George, D. A. Moniot, D. A. Bohling, K. M. Young, and A. A. Badowski, To be published.