Mechanical property changes of amorphous alumina induced by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 735-739

  Ikeyama, M ^a   Jin, P ^a   Tazawa, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Amorphous alumina; Ion implantation; Mechanical properties

Indexed keywords

AMORPHOUS MATERIALS; DENSIFICATION; ELASTIC MODULI; HARDNESS; ION IMPLANTATION; MORPHOLOGY; POROSITY; SPUTTERING; SUBSTRATES; THICK FILMS;

SURFACE PROFILE METERS; ULTRAMICRO INDENTATION;

ALUMINA;

EID: 0033513699     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00870-2     Document Type: Article

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