Ultramicrohardness measurement of ion implanted alumina

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 121, Issue 1-4, 1997, Pages 335-339

  Ikeyama, M ^a   Tanaka, T ^b   Chayahara, A ^b   Clissold, R A ^c   Wielunski, L S ^c   Swain, M V ^c  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; BORON; CARBON; ELASTIC MODULI; GOLD; HARDNESS; ION IMPLANTATION; SILICON; SURFACE PROPERTIES;

HIGH-ENERGY ION IMPLANTATION;

ALUMINA;

EID: 0031546180     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00597-6     Document Type: Article

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