Deposition of magnetic thin films by IBAD

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 148, Issue 1-4, 1999, Pages 907-911

  Sikola, T ^a   Spousta, J ^a   Dittrichova L ^a   Stransky M ^a   Zlamal J ^a   Matejka F ^a   Nebojsa, A ^b   Zemek, J ^c   Perina V ^d   Rafaja, D ^e   Ranno, L ^f  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

^b MASARYK UNIVERSITY   (Czech Republic)

^c INSTITUTE OF PHYSICS   (Czech Republic)

^d NUCLEAR PHYSICS INSTITUTE   (Czech Republic)

^e CHARLES UNIVERSITY   (Czech Republic)

^f LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

Cobalt; IBAD; Magnetic anisotropy; Nickel

Indexed keywords

COBALT; COMPOSITION EFFECTS; ION BEAMS; MAGNETIC ANISOTROPY; NICKEL; SPUTTER DEPOSITION; SURFACE ROUGHNESS; THERMAL EFFECTS;

ION-BEAM ASSISTED DEPOSITION (IBAD);

MAGNETIC THIN FILMS;

EID: 0033513674     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00816-7     Document Type: Article

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