Cleaning of metal surfaces by a broad beam ion source

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 865-868

  Šikola, Tomáš ^a   Dittrichová, Libuše ^a   Spousta, Jiří ^a   Zlámal, Jakub ^a   Štefka, Jan ^a  

^a BRNO UNIVERSITY OF TECHNOLOGY   (Czech Republic)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CODES (STANDARDS); COMPUTER SIMULATION; COPPER; ETCHING; ION BEAMS; ION SOURCES; MATHEMATICAL MODELS; SPUTTERING; ULTRATHIN FILMS;

RECOIL CARBON ATOM PENETRATIONS; SPUTTERING ANGLES OF INCIDENCE;

METAL CLEANING;

EID: 0031547879     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00022-0     Document Type: Article

References (7)

1. G. Carter and D.G. Armour, Thin Solid Films 80 (1981) 13.
2. Ch. Kittel, Introduction to Solid State Physics, 6th Ed. (Wiley, New York, 1986) p. 23.
3. H. Lüth, in: Surfaces and Interfaces of Solids, 2nd Ed. (Springer, Berlin, 1993) p. 449.
4. W. Möller, Thin Solid Films 228 (1993) 319.
5. S. Berg and I. Katardjiev, presented at SMMIB 95, San Sebastian 1995, Ext. Abstracts, p. 44, Surf. Coat. Tecnnol., to be published.
6. J.P. Biersack, S. Berg and C. Nender, Nucl. Instr. and Meth. B 59/60 (1991) 21.
7. T. Šikola, J. Spousta and L. Dittrichová, Scripta Fac. Sci. Nat. Univ. Masaryk. Brun. 22 (1992) 119.