Formation of hafnium nitride films by medium-energy ion-beam-assisted deposition

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 353-357

  Volz, K ^a   Kiuchi, M ^b   Ensinger, W ^a  

^a PHILIPPS UNIVERSITY MARBURG   (Germany)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

Hafnium nitride; Ion assisted deposition; Rutherford backscattering spectroscopy; X ray diffraction

Indexed keywords

COATING; DEPOSITION; FILM; ION PLATING;

EID: 0033509533     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00463-6     Document Type: Conference Paper

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