The formation of chromium/nitrogen phases by nitrogen ion implantation during chromium deposition as a function of ion-to-atom arrival ratio

Surface and Coatings Technology

Volumn 94-95, Issue , 1997, Pages 433-436

  Ensinger, W ^a   Kiuchi, M ^b  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b OSAKA NATIONAL RESEARCH INSTITUTE   (Japan)

Author keywords

Chromium nitrogen phase; Ion to atom arrival ratio; Nitrogen ion

Indexed keywords

CHROMIUM; CURRENT DENSITY; DEPOSITION; ELECTRON BEAMS; EVAPORATION; GAS ADSORPTION; ION BEAMS; ION BOMBARDMENT; NITROGEN; PHASE DIAGRAMS; PHASE TRANSITIONS; TITANIUM NITRIDE;

ION BEAM ASSISTED DEPOSITION (IBAD); ION TO ATOM ARRIVAL RATIO;

ION IMPLANTATION;

EID: 0031247828     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00274-0     Document Type: Article

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