Improved growth and thermal stability of Parylene films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 6, 1997, Pages 3138-3142

  Ganguli, Seshadri ^a   Agrawal, Hemant ^a   Wang, Bin ^a   McDonald, Jack F ^a   Lu, Toh M ^a   Yang, G R ^a   Gill, William N ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031485998     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580858     Document Type: Article

References (15)

1. Polymers for Electronic and Photonic Applications, edited by C. P. Wong (Academic, New York, 1993).
2. J. A. Moore, C.-I. Lang, T.-M. Lu, and G.-R. Yang, Polym. Mater. Sci. Eng, 72, 437 (1995).
3. Shin-Puu Jeng, Kelly Taylor, Mi-Chang Chang, Larry Ting, Tom Seha, Ken Numata, Tsuyoshi Tanaka, and Robert H. Havemann, Mater. Res. Soc. Symp. Proc. 381, 197 (1995).
4. W. F. Beach, C. Lee, D. R. Bassett, T. M. Austin, and R. Olson, "Xylylene Polymers," Encyclopedia of Polymer Science and Engineering (Wiley, New York, 1989), Vol. 17, p. 990.
5. R. Gutmann, W. N. Gill, T. M. Lu, J. F. McDonald, S. P Murarka, and E. J. Rymaszewski, Advanced Metallization and Interconnect Systems for ULSI Applications in 1996, edited by R. Havemann et al., MRS Conference Proceedings XII, (MRS, Pittsburgh, 1997), p. 393.
6. C. I. Lang, G. R. Yang, J. Moore, and T. M. Lu, Mater. Res. Soc. Symp. Proc. 381, 45 (1995).
7. J. F. Gaynor, S. B. Desu, and J. J. Senkevich, Macromolecules 28, 7343 (1995).
8. C. H. Ting and T. E. Seidel, Mater. Res. Soc. Symp. Proc. 381, 3 (1995).
9. W. F. Gorham, J. Polym. Sci. A 1.4, 3027 (1966).
10. L. You, G.-R. Yang, T.-M. Lu, J. A. Moore, and J. F. McDonald, US Patent 5 268 202 (1993).
11. P.J. Flory, Principles of Polymer Chemistry (Cornell University Press, Ithaca, 1953).
12. W. F. Beach, Macromolecules 11, 72 (1978).
13. P. V. Danckwerts, Trans. Faraday Soc. 46, 300 (1950).
14. P. V. Danckwerts, Trans. Faraday Soc. 47, 1014 (1951).
15. S. L. Madorsky and S. Strauss, J. Res. Natl. Bur. Stand. 55, 2624 (1955).