Molecular dynamics study on channeling and lateral straggle for sharp shallow junction formation: Low energy as-ion implantation

Journal of the Korean Physical Society

Volumn 34, Issue 5, 1999, Pages 477-479

  Kang, Jeong Won ^a   Hwang, Ho Jung ^a  

^a Chung Ang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033448556     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

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