Ge(001):B gas-source molecular beam epitaxy: B surface segregation, hydrogen desorption, and film growth kinetics

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 2, 1999, Pages 354-362

  Kim, H ^a   Greene, J E ^a  

^a University of Illinois at Urbana Champaign   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033440280     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.581595     Document Type: Article

References (32)

1. H. Temkin, J. C. Bean, T. P. Tersall, N. A. Olson, and D. V. Lang, Appl. Phys. Lett. 49, 155 (1986).
2. A. Grabe, H. Kibbel, U. Knig, U. Erben, and E. Kasper, IEEE Electron Device Lett. 13, 206 (1992).
3. W. P. Maszara and T. Thompson, J. Appl. Phys. 72, 4477 (1992).
4. Y. Kinoshita, K. Imai, H. Yoshida, H. Suzuki, T. Tatsumi, and T. Yamazaki, Proceedings of the International Electronic Devices Meeting, San Francisco, December, 1994, p. 441; Y. Kiyota, T. Nakamura, S. Suzuki, and T. Inada, IEEE Trans. Electron Devices 79C, 554 (1996).
5. Y. Kinoshita, K. Imai, H. Yoshida, H. Suzuki, T. Tatsumi, and T. Yamazaki, Proceedings of the International Electronic Devices Meeting, San Francisco, December, 1994, p. 441; Y. Kiyota, T. Nakamura, S. Suzuki, and T. Inada, IEEE Trans. Electron Devices 79C, 554 (1996).
6. H. Kim, G. Glass, S. Y. Park, T. Spila, N. Taylor, J. R. Abelson, and J. E. Greene, Appl. Phys. Lett. 69, 3869 (1996).
7. H. Kim, G. Glass, T. Spila, N. Taylor, J. R. Abelson, and J. E. Greene, J. Appl. Phys. 82, 2288 (1997).
8. G. Glass, H. Kim, M. R. Sardela, Q. Lu, J. R. Abelson, and J. E. Greene, Surf. Sci. 392, L63 (1997).
9. H. Kim, G. Glass, N. Taylor, and J. E. Greene (unpublished).
10. H. Kim, N. Taylor, J. R. Abelson, and J. E. Greene, J. Appl. Phys. 82, 6062 (1997).
11. H. Kim, P. Desjardins, J. R. Abelson, and J. E. Greene, Phys. Rev. B 58, 4803 (1998).
12. Q. Lu, T. R. Bramblett, M.-A. Hasan, N.-E. Lee, and J. E. Greene, J. Appl. Phys. 78, 6027 (1995).
13. Q. Lu, T. R. Bramblett, N.-E. Lee, M.-A. Hasan, T. Karasawa, and J. E. Greene, J. Appl. Phys. 77, 3067 (1995).
14. X.-J. Zhang, G. Xue, A. Agarwal, R. Tsu, M.-A. Hasan, J. E. Greene, and A. Rockett, J. Vac. Sci. Technol. A 11, 2553 (1993).
15. L. B. Lewis, J. Segall, and K. C. Janda, J. Chem. Phys. 102, 7222 (1995).
16. S. M. Cohen, T. I. Hukka, Y. L. Yang, and M. P. D'evelyn, Thin Solid Films 225, 155 (1993).
17. P. A. Redhead, Vacuum 12, 203 (1962).
18. F. M. Lord and J. S. Kittelberger, Surf. Sci. 43, 173 (1974).
19. M. P. D'evelyn, S. M. Cohen, E. Rouchouze, and Y. L. Yang, J. Chem. Phys. 98, 3560 (1993).
20. O. Madelung, Semiconductors - Basic Data, 2nd ed. (Springer, Berlin, 1996), p. 38.
21. C. Kittel, Introduction to Solid State Physics, 6th ed. (Wiley, New York, 1986), p. 76.
22. R. L. Headrick, B. E. Weir, A. F. Levi, D. J. Eaglesham, and L. C. Feldman, Appl. Phys. Lett. 57, 2779 (1990).
23. Y. Wang and R. J. Hamers, Appl. Phys. Lett. 66, 2057 (1995); J. Vac. Sci. Technol. A 13, 1431 (1995).
24. Y. Wang and R. J. Hamers, Appl. Phys. Lett. 66, 2057 (1995); J. Vac. Sci. Technol. A 13, 1431 (1995).
25. Y. Wang, R. J. Hamers, and E. Kaxiras, Phys. Rev. Lett. 74, 403 (1995).
26. C. C. Chang, Surf. Sci. 48, 9 (1975).
27. L. E. Davis, N. C. McDonald, P. W. Palmberg, G. E. Riach, and R. E. Weber, Handbook of Auger Electron Spectroscopy, 2nd ed. (Physical Electronics Industries, Flying Cloud, MN, 1976).
28. Ph. Avouris, I.-W. Lyo, F. Bozso, and E. Kaxiras, J. Vac. Sci. Technol. A 8, 3405 (1990).
29. T. R. Bramblett, Q. Lu, N.-E. Lee, N. Taylor, M.-A. Hasan, and J. E. Greene, J. Appl. Phys. 77, 1504 (1995).
30. ss values were, typically, less than 300 Å.
31. S. A. Barnett and J. E. Greene, Surf. Sci. 151, 67 (1985).
32. T. R. Bramblett, Q. Lu, T. Karasawa, M.-A. Hasan, S. K. Jo, and J. E. Greene, J. Appl. Phys. 76, 1884 (1994).