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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 5, 1999, Pages 3077-3080

Graphite macroparticle filtering efficiency of three different magnetic filter designs used in the filtered cathodic vacuum arc deposition of tetrahedral amorphous carbon films

(4) Hakovirta, M a Walter, K C a Wood, B P a Nastasi, M a

a LOS ALAMOS NATIONAL LABORATORY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033425667 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.582009 Document Type: Article

Times cited : (5)

References (14)

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