Application of a bias-current modulation technique to radiofrequency glow discharge optical emission spectrometry

Analytical Sciences

Volumn 15, Issue 6, 1999, Pages 517-523

  Wagatsuma, Kazuaki ^a   Matsuta, Hideyuki ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Conduction of the bias current; Current modulation; Detection limit; Fe based alloys; Radio frequency Grimm glow discharge plasma; Self bias potential

Indexed keywords

BINARY ALLOYS; GLOW DISCHARGES; IRON ALLOYS; LOW PASS FILTERS; MODULATION; OPTICAL EMISSION SPECTROSCOPY; OPTICAL SIGNAL PROCESSING; PLASMA THEORY; SPECTROMETRY;

CURRENT MODULATION; DETECTION LIMITS; FE-BASED ALLOYS; GLOW DISCHARGE PLASMAS; SELF-BIAS;

BIAS CURRENTS;

ALLOY; MANGANESE;

ACCURACY; ANALYTIC METHOD; ARTICLE; ARTIFACT REDUCTION; CHEMICAL ANALYSIS; PHYSICAL PHASE; RADIOFREQUENCY RADIATION;

EID: 0033395543     PISSN: 09106340     EISSN: None     Source Type: Journal    
DOI: 10.2116/analsci.15.517     Document Type: Article

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