Characterization of the piezoelectric response of aluminum nitride grown by DC magnetron sputtering for applications in thin-film resonators

Materials Research Society Symposium - Proceedings

Volumn 444, Issue , 1997, Pages 215-219

  Naik, Rajan S ^a   Lutsky, Joseph J ^a   Reif, Rafael ^a   Sodini, Charles G ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; PERFORMANCE; PIEZOELECTRICITY; SEMICONDUCTING ALUMINUM COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; SEMICONDUCTOR GROWTH; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS;

ALUMINUM NITRIDE; MAXIMUM EFFECTIVE COUPLING COEFFICIENT; PARAMETER EXTRACTION TECHNIQUE; THIN FILM BULK ACOUSTIC WAVE RESONATORS;

RESONATORS;

EID: 0030643165     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)