Aluminium nitride thin films: Effect of deposition parameters on piezoelectric properties

Annales de Chimie: Science des Materiaux

Volumn 22, Issue 8, 1997, Pages 675-678

  Pommier, J C ^a,b   Cachard, A ^a  

^a UNIVERSITÉ JEAN MONNET   (France)

^b Laboratoire Hubert Curien   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0043004253     PISSN: 01519107     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (10)

1. J.S. WANG AND K.M. LAKIN, Appl. Phys. Lett., 40, 308 (1982)
2. T. SHIOSAKI, M. ADACHI and A. KAWABATA. Thin Solid Films, 96, 129 (1982)
3. R. MACMAHON, J. AFFINITO and R. PARSONS, J. Vac. Se. Technol., 20, 376 (1982)
4. G. ESTE, R. SURRIDGE and W.D. WESTWOOD, J. Vac. Se. Technol., A4, 989 (1986)
5. S. MUHL, J A ZAPIEN, J M MENDEZ and E ANDRADE, J.Phys. D: Appl. Phys. 30 (1997)
6. A. CACHARD, R. FILITT, I. KADAD and J.C. POMMIER, Vacuum, 41, 1151 (1990)
7. P. REY, Thesis, INP Grenoble (1990)
8. J.C. POMMIER, D.U.R., Université de Saint-Etienne (1995)
9. T. LAURENT, Thesis, Université de Franche-Comte (1997)
10. N. TIROLE, A. CHOUJAA, D. HAUDEN, G. MARTIN, P. BLIND, M. FROELICHER, J.C. POMMIER and A. CACHARD, 7e European Frequency and Time Forum, Neuchâtel (1993)