Time-dependent buckling phenomena of polysilicon micro beams

Microelectronics Journal

Volumn 30, Issue 11, 1999, Pages 1169-1172

  Teh, Kwok Siong ^a   Lin, Liwei ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUCKLING; ELASTIC MODULI; ELASTOPLASTICITY; HIGH TEMPERATURE EFFECTS; MATHEMATICAL MODELS; MELTING; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; PLASTIC DEFORMATION; RESIDUAL STRESSES; SEMICONDUCTING SILICON;

BUCKLING PHENOMENA; POLYSILICON MICROBEAMS; TIME DEPENDENT MATERIAL;

BEAM LEAD DEVICES;

EID: 0033359640     PISSN: 00262692     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2692(99)00081-6     Document Type: Article

References (14)

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